|
Product Details:
|
| Machine Type: | Multi-Arc Ion Coating System Ionic Thin Film Coate | Voltage: | 220 V |
|---|---|---|---|
| Power(w): | / | Dimension(l*w*h): | 1900*800*1900mm |
| Warranty: | 1 Year | Weight (kg): | 100 |
| Highlight: | High-Vacuum Ion Coating System,Cathodic Arc Deposition Device,Ionic Thin Film Coater |
||
Item | Specification |
1. Vacuum chamber | Ф500×H420mm, 304 stainless steel, front door opening structure; Chamber heating temperature: room temperature ~ 350±1℃; |
2. Vacuum system | A high vacuum system composed of a composite molecular pump + direct-coupled rotary vane pump + high vacuum valve, and a digital display composite vacuum gauge; |
3. Vacuum limit | Better than 6.0×10-5Pa (no load, after baking and degassing); |
4. Leak rate | Equipment pressure boost rate ≤0.8Pa/h;Equipment pressure maintenance: 12 hours after stopping the pump, the vacuum is ≤10Pa; |
5. Pumping speed | (No load) Pumped from the atmosphere to 5.0×10-3Pa≤15min; |
6. Substrate table size | Φ150mm, 3 rotation stations; |
7. Substrate stage rotation | Substrate rotation: 0~20 rpm; |
8. Sputtering target | DN100 new magnetic filter multi-arc target 2 sets |
9. Pulse bias power supply | -1000V, 1 set; |
11. Control method | PLC+touch screen human-machine interface semi-automatic control system; |
12. Alarm and protection | Alarm and implement corresponding protection measures for abnormal conditions such as water shortage, overcurrent and overvoltage, circuit breakage, etc. in pumps and electrodes; complete logic program interlock protection system; |
13. Land occupation | (Host) L1900×W800×H1900(mm). |
Contact Person: Kaitlyn Wang
Tel: 19376687282
Fax: 86-769-83078748