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Integrated In-situ Spectral Ellipsometer Optical Films In-situ Analysis Machine Customized Spectroscopic Ellipsometer

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Integrated In-situ Spectral Ellipsometer Optical Films In-situ Analysis Machine Customized Spectroscopic Ellipsometer

Integrated In-situ Spectral Ellipsometer Optical Films In-situ Analysis Machine Customized Spectroscopic Ellipsometer
Integrated In-situ Spectral Ellipsometer Optical Films In-situ Analysis Machine Customized Spectroscopic Ellipsometer Integrated In-situ Spectral Ellipsometer Optical Films In-situ Analysis Machine Customized Spectroscopic Ellipsometer Integrated In-situ Spectral Ellipsometer Optical Films In-situ Analysis Machine Customized Spectroscopic Ellipsometer Integrated In-situ Spectral Ellipsometer Optical Films In-situ Analysis Machine Customized Spectroscopic Ellipsometer Integrated In-situ Spectral Ellipsometer Optical Films In-situ Analysis Machine Customized Spectroscopic Ellipsometer Integrated In-situ Spectral Ellipsometer Optical Films In-situ Analysis Machine Customized Spectroscopic Ellipsometer

Large Image :  Integrated In-situ Spectral Ellipsometer Optical Films In-situ Analysis Machine Customized Spectroscopic Ellipsometer

Product Details:
Place of Origin: Guangdong, China
Brand Name: LONROY
Payment & Shipping Terms:
Minimum Order Quantity: 1

Integrated In-situ Spectral Ellipsometer Optical Films In-situ Analysis Machine Customized Spectroscopic Ellipsometer

Description
Type: Testing Machine Accuracy Class: High Accuracy
Accuracy: / Application: Auto Testing
Customized Support: OEM, ODM, OBM Power: --
Protection Class: Ip56 Voltage: 220 V
Warranty: 1 Year Polarizers: Glan-Thompson
Fiber: Anti-UV Passivation; NA=0.22;clear Aperture 600um Power: 220VAC+10%
Room Temperature: Environment Temperature(10-30)℃
Highlight:

spectroscopic ellipsometer optical films analyzer

,

customized in-situ spectral ellipsometer

,

lab test machine for optical films

Integrated In-situ Spectral Ellipsometer Optical Films In-situ Analysis Machine Customized Spectroscopic Ellipsometer

 

I. Overview

LR-A426 is an integrated in-situ spectroscopic ellipsometer designed for organic/inorganic coatings. The need for membrane process research is to develop customized in-situ film online monitoring technology. Develop and rapidly implement in-situ characterization and analysis of optical films.

 

 

II. Test Cases

 Integrated In-situ Spectral Ellipsometer Optical Films In-situ Analysis Machine Customized Spectroscopic Ellipsometer 0

 

Film-forming process monitoring

 

 Integrated In-situ Spectral Ellipsometer Optical Films In-situ Analysis Machine Customized Spectroscopic Ellipsometer 2

 

Film thickness characterization

 

Integrated In-situ Spectral Ellipsometer Optical Films In-situ Analysis Machine Customized Spectroscopic Ellipsometer 4

 

 

III. Product Applications

It is widely applied in the physical/chemical vapor deposition, ALD deposition and other optical film processing procedures of metal films, organic films and inorganic films. It can conduct in-situ online monitoring during the process and provide real-time feedback on the measured physical property data.

 

  

 

Integrated In-situ Spectroscopic Ellipsometer Optical Films In-situ Analysis Machine Customized Spectroscopic Ellipsometer

 

Technical Specification

 

Incident angle

65°

Beam deviation

< 0.3°

Measurement parameters

Psi&Del,TanPsi&CosDel,Alpha&Beta

Polarizers

Glan-Thompson

Material

a-BBO

Compensator

quarter-wave phase delay, hyper achromatic

Intensity selection

Linear optical density selection element. Ensures good signal-to-noise ratio in measurement process, improves data accuracy,
avoids light intensity to saturate or too weak to reduce the signal-to-noise ratio and accuracy

Optical design

dual fiber convey the light from lamp to spectrometer through polarization elements;stable light path, convenient to change lamps

Fiber

anti-UV passivation; NA=0.22;clear aperture 600um

Micro light spot

diameter ≤200um, to distinguish between the useful light reflected from front surface and the useless light reflected from the
bottom surface, easy to disassemble

Slit

1 50um, for distinguishing between the useful light reflected from front surface and the useless light reflected from the bottom
surface

 

 

 

 

Integrated In-situ Spectral Ellipsometer Optical Films In-situ Analysis Machine Customized Spectroscopic Ellipsometer 6Integrated In-situ Spectral Ellipsometer Optical Films In-situ Analysis Machine Customized Spectroscopic Ellipsometer 8Integrated In-situ Spectral Ellipsometer Optical Films In-situ Analysis Machine Customized Spectroscopic Ellipsometer 10

Contact Details
DONGGUAN LONROY EQUIPMENT CO LTD

Contact Person: Kaitlyn Wang

Tel: 19376687282

Fax: 86-769-83078748

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