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उत्पाद विवरण:
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| प्रकार: | परीक्षण मशीन | सटीकता वर्ग: | उच्च सटीकता |
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| शुद्धता: | / | आवेदन: | स्वत: परीक्षण |
| अनुकूलित समर्थन: | ओईएम, ओडीएम, ओबीएम | शक्ति: | - |
| संरक्षण वर्ग: | आईपी56 | वोल्टेज: | 220 वी |
| गारंटी: | 1 वर्ष | ध्रुवीकरणकर्ता: | ग्लान-थॉम्पसन |
| रेशा: | एंटी-यूवी निष्क्रियता; NA=0.22;स्पष्ट एपर्चर 600um | शक्ति: | 220वैक+10% |
| कमरे का तापमान: | पर्यावरण का तापमान(10-30)℃ | ||
| प्रमुखता देना: | spectroscopic ellipsometer optical films analyzer,customized in-situ spectral ellipsometer,lab test machine for optical films |
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Integrated In-situ Spectral Ellipsometer Optical Films In-situ Analysis Machine Customized Spectroscopic Ellipsometer
I. Overview
LR-A426 is an integrated in-situ spectroscopic ellipsometer designed for organic/inorganic coatings. The need for membrane process research is to develop customized in-situ film online monitoring technology. Develop and rapidly implement in-situ characterization and analysis of optical films.
II. Test Cases
Film-forming process monitoring
Film thickness characterization
III. Product Applications
It is widely applied in the physical/chemical vapor deposition, ALD deposition and other optical film processing procedures of metal films, organic films and inorganic films. It can conduct in-situ online monitoring during the process and provide real-time feedback on the measured physical property data.
Integrated In-situ Spectroscopic Ellipsometer Optical Films In-situ Analysis Machine Customized Spectroscopic Ellipsometer
Technical Specification
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Incident angle |
65° |
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Beam deviation |
< 0.3° |
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Measurement parameters |
Psi&Del,TanPsi&CosDel,Alpha&Beta |
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Polarizers |
Glan-Thompson |
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Material |
a-BBO |
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Compensator |
quarter-wave phase delay, hyper achromatic |
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Intensity selection |
Linear optical density selection element. Ensures good signal-to-noise ratio in measurement process, improves data accuracy, |
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Optical design |
dual fiber convey the light from lamp to spectrometer through polarization elements;stable light path, convenient to change lamps |
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Fiber |
anti-UV passivation; NA=0.22;clear aperture 600um |
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Micro light spot |
diameter ≤200um, to distinguish between the useful light reflected from front surface and the useless light reflected from the |
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Slit |
1 50um, for distinguishing between the useful light reflected from front surface and the useless light reflected from the bottom |
व्यक्ति से संपर्क करें: Kaitlyn Wang
दूरभाष: 19376687282
फैक्स: 86-769-83078748
Hindi
