| 유형: | 테스트 머신 | 정확도 등급: | 높은 정확도 |
|---|---|---|---|
| 정확성: | / | 애플리케이션: | 자동 테스트 |
| 맞춤형 지원: | OEM, ODM, OBM | 힘: | - |
| 보호 등급: | IP56 | 전압: | 220 v |
| 보증: | 1년 | 편광판: | 글랜 톰슨 |
| 섬유: | 항UV 패시베이션; NA=0.22;명확한 조리개 600um | 힘: | 220Vac+10% |
| 실온: | 환경온도(10-30)℃ | ||
| 강조하다: | spectroscopic ellipsometer optical films analyzer,customized in-situ spectral ellipsometer,lab test machine for optical films |
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Integrated In-situ Spectral Ellipsometer Optical Films In-situ Analysis Machine Customized Spectroscopic Ellipsometer
I. Overview
LR-A426 is an integrated in-situ spectroscopic ellipsometer designed for organic/inorganic coatings. The need for membrane process research is to develop customized in-situ film online monitoring technology. Develop and rapidly implement in-situ characterization and analysis of optical films.
II. Test Cases
Film-forming process monitoring
Film thickness characterization
III. Product Applications
It is widely applied in the physical/chemical vapor deposition, ALD deposition and other optical film processing procedures of metal films, organic films and inorganic films. It can conduct in-situ online monitoring during the process and provide real-time feedback on the measured physical property data.
Integrated In-situ Spectroscopic Ellipsometer Optical Films In-situ Analysis Machine Customized Spectroscopic Ellipsometer
Technical Specification
|
Incident angle |
65° |
|
Beam deviation |
< 0.3° |
|
Measurement parameters |
Psi&Del,TanPsi&CosDel,Alpha&Beta |
|
Polarizers |
Glan-Thompson |
|
Material |
a-BBO |
|
Compensator |
quarter-wave phase delay, hyper achromatic |
|
Intensity selection |
Linear optical density selection element. Ensures good signal-to-noise ratio in measurement process, improves data accuracy, |
|
Optical design |
dual fiber convey the light from lamp to spectrometer through polarization elements;stable light path, convenient to change lamps |
|
Fiber |
anti-UV passivation; NA=0.22;clear aperture 600um |
|
Micro light spot |
diameter ≤200um, to distinguish between the useful light reflected from front surface and the useless light reflected from the |
|
Slit |
1 50um, for distinguishing between the useful light reflected from front surface and the useless light reflected from the bottom |
담당자: Kaitlyn Wang
전화 번호: 19376687282
팩스: 86-769-83078748
Korean
