| タイプ: | テストマシン | 精度クラス: | 高精度 |
|---|---|---|---|
| 正確さ: | / | 応用: | 自動テスト |
| カスタマイズされたサポート: | OEM、ODM、OBM | 力: | - |
| 保護クラス: | IP56 | 電圧: | 220 v |
| 保証: | 1年 | 極化器: | グラン・トンプソン |
| ファイバ: | 耐紫外線不動態化。 NA=0.22;クリアアパーチャ600um | 力: | 220Vac+10% |
| 室温: | 環境温度(10-30)℃ | ||
| ハイライト: | spectroscopic ellipsometer optical films analyzer,customized in-situ spectral ellipsometer,lab test machine for optical films |
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Integrated In-situ Spectral Ellipsometer Optical Films In-situ Analysis Machine Customized Spectroscopic Ellipsometer
I. Overview
LR-A426 is an integrated in-situ spectroscopic ellipsometer designed for organic/inorganic coatings. The need for membrane process research is to develop customized in-situ film online monitoring technology. Develop and rapidly implement in-situ characterization and analysis of optical films.
II. Test Cases
Film-forming process monitoring
Film thickness characterization
III. Product Applications
It is widely applied in the physical/chemical vapor deposition, ALD deposition and other optical film processing procedures of metal films, organic films and inorganic films. It can conduct in-situ online monitoring during the process and provide real-time feedback on the measured physical property data.
Integrated In-situ Spectroscopic Ellipsometer Optical Films In-situ Analysis Machine Customized Spectroscopic Ellipsometer
Technical Specification
|
Incident angle |
65° |
|
Beam deviation |
< 0.3° |
|
Measurement parameters |
Psi&Del,TanPsi&CosDel,Alpha&Beta |
|
Polarizers |
Glan-Thompson |
|
Material |
a-BBO |
|
Compensator |
quarter-wave phase delay, hyper achromatic |
|
Intensity selection |
Linear optical density selection element. Ensures good signal-to-noise ratio in measurement process, improves data accuracy, |
|
Optical design |
dual fiber convey the light from lamp to spectrometer through polarization elements;stable light path, convenient to change lamps |
|
Fiber |
anti-UV passivation; NA=0.22;clear aperture 600um |
|
Micro light spot |
diameter ≤200um, to distinguish between the useful light reflected from front surface and the useless light reflected from the |
|
Slit |
1 50um, for distinguishing between the useful light reflected from front surface and the useless light reflected from the bottom |
コンタクトパーソン: Kaitlyn Wang
電話番号: 19376687282
ファックス: 86-769-83078748
Japanese
