| 유형: | 테스트 머신 | 정확도 등급: | 높은 정확도 |
|---|---|---|---|
| 정확성: | / | 애플리케이션: | 자동 테스트 |
| 맞춤형 지원: | OEM, ODM, OBM | 힘: | - |
| 보호 등급: | IP56 | 전압: | 220 v |
| 보증: | 1년 | 파장 범위: | 250nm ~ 1700nm |
| 스팟 크기: | 1mm ~ 5mm(가변) | 샘플 크기: | 직경 최대 200mm |
| 측정 시간: | 위치 포인트당 약 1초 | ||
| 강조하다: | micro-area spectroscopic ellipsometer,pattern structure measurement instrument,lab spectroscopic ellipsometer with warranty |
||
Spectroscopic Ellipsometer for Micro-area Pattern Structure Measurement Spectroscopic Ellipsometer Instrument
I. Overview
LR-SE-M is a dedicated spectroscopic ellipsometer customized for the semiconductor industry for micro-area pattern structure measurement. It adopts 1. ultra-miniature light spot detection measurement technology and 2. customized ultra-fast measurement speed technology. It can be applied to the measurement of n/k/d of anti-reflection films, conductive films and other thin films on various transparent substrates, and is perfectly suitable for the optical parameter analysis of various micro-area patterns.
II. Special Features
1. The spot size can be customized, with the minimum reaching 30um.
2. Ultra-fast measurement, with a single measurement time of less than 0.5 seconds;
3. The series configuration is flexible and supports customized functional design.
4. Compact structure, more suitable for online integrated measurement.
III. Measurement Examples
Microstructure measurement of captured area in the image
Spectroscopic Ellipsometer for Micro-area Pattern Structure Measurement Spectroscopic Ellipsometer Instrument
Technical Specification
|
Wavelength Range |
250 nm to 1700 nm |
|
Spot Size |
1 mm to 5 mm (variable) |
|
Sample Size |
Up to 200 mm in diameter |
|
Measurement Thickness Range* |
~30 μM |
|
Measurement Time |
Approximately 1 second per position point |
|
Incident Angle Range |
20° to 90° (5-degree intervals) |
|
Repeatability Error* |
Less than 1 Å (angstrom) |
담당자: Kaitlyn Wang
전화 번호: 19376687282
팩스: 86-769-83078748
Korean
