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उत्पाद विवरण:
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| प्रकार: | परीक्षण मशीन | सटीकता वर्ग: | उच्च सटीकता |
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| शुद्धता: | / | आवेदन: | स्वत: परीक्षण |
| अनुकूलित समर्थन: | ओईएम, ओडीएम, ओबीएम | शक्ति: | - |
| संरक्षण वर्ग: | आईपी56 | वोल्टेज: | 220 वी |
| गारंटी: | 1 वर्ष | तरंग दैर्ध्य सीमा: | 250 एनएम से 1700 एनएम |
| हाजिर आकार: | 1 मिमी से 5 मिमी (परिवर्तनीय) | नमूने का आकार: | व्यास में 200 मिमी तक |
| माप काल: | प्रति स्थिति बिंदु लगभग 1 सेकंड | ||
| प्रमुखता देना: | micro-area spectroscopic ellipsometer,pattern structure measurement instrument,lab spectroscopic ellipsometer with warranty |
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Spectroscopic Ellipsometer for Micro-area Pattern Structure Measurement Spectroscopic Ellipsometer Instrument
I. Overview
LR-SE-M is a dedicated spectroscopic ellipsometer customized for the semiconductor industry for micro-area pattern structure measurement. It adopts 1. ultra-miniature light spot detection measurement technology and 2. customized ultra-fast measurement speed technology. It can be applied to the measurement of n/k/d of anti-reflection films, conductive films and other thin films on various transparent substrates, and is perfectly suitable for the optical parameter analysis of various micro-area patterns.
II. Special Features
1. The spot size can be customized, with the minimum reaching 30um.
2. Ultra-fast measurement, with a single measurement time of less than 0.5 seconds;
3. The series configuration is flexible and supports customized functional design.
4. Compact structure, more suitable for online integrated measurement.
III. Measurement Examples
Microstructure measurement of captured area in the image
Spectroscopic Ellipsometer for Micro-area Pattern Structure Measurement Spectroscopic Ellipsometer Instrument
Technical Specification
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Wavelength Range |
250 nm to 1700 nm |
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Spot Size |
1 mm to 5 mm (variable) |
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Sample Size |
Up to 200 mm in diameter |
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Measurement Thickness Range* |
~30 μM |
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Measurement Time |
Approximately 1 second per position point |
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Incident Angle Range |
20° to 90° (5-degree intervals) |
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Repeatability Error* |
Less than 1 Å (angstrom) |
व्यक्ति से संपर्क करें: Kaitlyn Wang
दूरभाष: 19376687282
फैक्स: 86-769-83078748
Hindi
