Compact High-precision Reflective Film Thickness Meter Optical Constants Measuring Equipment Manufacturer Price
I. Overview
The LR-A429 Compact High-Precision Reflective Film Thickness Meter utilizes the principle of optical interference. By analyzing the interference pattern formed by the reflected light from the film surface and the reflected light from the interface between the film and the substrate, it can quickly and accurately measure the thickness of the film, optical constants, and other information.
1. Optical film measurement solution;
2. Non-contact, non-destructive measurement;
3. The core algorithm supports the analysis of thin films to thick films, and single-layer films to multi-layer films.
4. Measurement accuracy of film thickness repeatability: 0.02 nm
5. Fully automatic measurement. The number and position of measurement points can be edited as needed in the Recipe.
II. Product Features
1. Utilizing a high-intensity halogen light source, the spectrum covers the range from ultraviolet to near-infrared.
2. It adopts a highly integrated design of optics, mechanics and electronics, featuring a small size and easy operation.
3. Based on the principle of interference of reflected light at the interface and the lower interface of the thin film layer, it is easy to analyze from a single layer to multiple layers.
4. Equipped with powerful core analysis algorithms: FFT is used to analyze thick films, and curve fitting analysis method is employed to analyze the physical parameter information of thin films;
III. Product Applications
It is widely applied in the measurement of various types of protective films, organic films, inorganic films, metal films, coatings, etc.
ICompact High-precision Reflective Film Thickness Meter Optical Constants Measuring Equipment Manufacturer Price
Technical Specification
Basic function
Obtain film thickness values and R spectra
Spectral analysis range
380nm-1100nm
Measure the spot size
1-5mm
Measurement accuracy of film thickness repeatability:
Automated R-Theta mobile platform, sample stage diameter not less than 200mm
* Testing method
Automated testing at any multiple points to generate a thickness mapping map (1. circular/square, 2.Radial shape, 3. Center or edge exclusion, 4. Customization (edit coordinate points according to sample needs)
Test speed (including vacuum chuck)
5 points in 5 seconds, 25 points in 14 seconds, 57 points in 30 seconds
Light source
Standard halogen light source (with a lifespan of 10000 hours)
Reflectivity simulation
It can model different coating materials and simulate the reflectivity curve of the coating film system
Analysis software
up to hundreds of optical material constant databases, and supports user-defined optical material libraries; Provide modeling,simulation, and analysis capabilities for multi-layer isotropic optical thin films;
Sample testing table specifications
Measurable wafer sizes
2 inches&4 inches&6 inches&8 inches&12 inches
Wafer fixation method
vacuum adsorption
Moving range of the stage
not less than 200mm * 200mm
Manually place the sample, automatically map and measure, and the number and position of measurement points can be edited as needed in the Recipe
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